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Thermal Characterization of Hard Decorative Thin Films
Author(s) -
Macedo Francisco,
Vaz Filipe,
Fernandes Ana C.,
Rebouta Luís,
Carvalho Sandra,
Junge Klaus H.,
Bein Bruno K.
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200730609
Subject(s) - materials science , thin film , surface roughness , surface finish , thermal , penetration depth , optics , composite material , penetration (warfare) , sputter deposition , laser , substrate (aquarium) , sputtering , nanotechnology , oceanography , physics , engineering , operations research , geology , meteorology
(TiSi)N and TiCO thin films deposited by DC reactive magnetron sputtering on steel are analyzed here with regard to their thermal properties by means of modulated IR radiometry, a measurement method especially suited to analyze thin films and coatings. By varying the modulation frequency of intensity‐modulated laser beam heating, this method allows to control the thermal waves' penetration depth, thus controlling the depth profile of the thermal properties beneath the sample surface. At high modulation frequencies, corresponding to small penetration depths, surface roughness effects are sensed, and at low modulation frequencies, corresponding to large penetration depths, the transition between film and substrate is sensed. The measured thermal parameters are compared with structural/morphological data obtained by techniques such as XRD and AFM. Several systematic correlations have been found between deposition conditions, structural‐physical features, and surface roughness, on the one hand, and the thermal parameters on the other hand.