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Investigations of Apatite‐Structure Coatings Deposited by Reactive Magnetron Sputtering Dedicated to IT‐SOFC
Author(s) -
Briois Pascal,
Lapostolle Frédéric,
Billard Alain
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200730410
Subject(s) - materials science , amorphous solid , scanning electron microscope , apatite , argon , annealing (glass) , ceramic , sputtering , chemical engineering , sputter deposition , oxide , metallurgy , metal , mineralogy , composite material , thin film , nanotechnology , crystallography , chemistry , engineering , organic chemistry
Apatite La 9.33 Si 6 O 26 coatings were co‐sputtered on rotating substrates from metallic La and Si targets in the presence of a reactive argon–oxygen gas mixture or in pure argon. This material is a potential candidate as electrolyte material for intermediate temperature‐solid oxide fuel cells (IT‐SOFC). The structural and chemical features of these films have been determined by X‐ray diffraction (XRD) and scanning electron microscopy (SEM). It is shown that the as‐deposited metallic or ceramic coatings, initially amorphous, crystallise in apatite structure as a function of their composition after annealing (and oxidising) treatment under air beyond 973 K.