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Magnetron–AF Plasma Polymerization
Author(s) -
Yasuda Hirotsugu
Publication year - 2008
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200700116
Subject(s) - plasma polymerization , glow discharge , materials science , polymerization , plasma , electrode , dissociation (chemistry) , analytical chemistry (journal) , cavity magnetron , toroid , optoelectronics , polymer , chemistry , thin film , composite material , nanotechnology , sputtering , physics , organic chemistry , quantum mechanics
Abstract The magnetron–AF (audio frequency) plasma polymerization has the following unique advantageous features for industrial scale operation. 1) The dissociation glow in form of a toroidal glow shifts the main deposition from the electrode surface to the gas phase. 2) The toroidal glow electrode surface receives no or very little deposition of the plasma polymer, which makes the stable and prolonged operation of the plasma polymerization possible. 3) The magnetic field confines the glow volume to within the inter electrode volume, which dramatically reduces the deposition elsewhere in the reactor. 4) The magnetic field lowers the breakdown voltage of molecules dramatically, and makes it possible to operate plasma polymerization in low‐pressure domains with the characteristics of a low‐voltage/high‐current process.