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Allylamine Plasma Polymer Coatings of Interior Surfaces in Small Trench Structures
Author(s) -
Besch Wilfried,
Foest Rüdiger,
Schröder Karsten,
Ohl Andreas
Publication year - 2008
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200700104
Subject(s) - trench , materials science , x ray photoelectron spectroscopy , plasma polymerization , plasma , conformal coating , polymer , deposition (geology) , thin film , coating , microwave , plasma enhanced chemical vapor deposition , polymerization , composite material , chemical engineering , nanotechnology , layer (electronics) , geology , paleontology , physics , quantum mechanics , sediment , engineering
The modification of interior surfaces in small trench structures was studied for plasma polymerization processes. Pulsed AAm microwave plasmas were applied to deposit thin films at varied applied microwave powers. Specially designed test specimens served as substrates to investigate trenches with AR from 2 to 10. Thin films coated on external and interior surfaces were analyzed with FT‐IR spectroscopy and XPS measurements. Dense films with similar morphology are observed in all locations. Chemical composition does neither depend on AR nor on depth. In conclusion, this type of AAm plasma polymer deposition is useful for conformal coating of deep trenches with high AR.