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Ge/Si Quantum Dot Formation From Non‐Uniform Cluster Fluxes
Author(s) -
Rider Amanda E.,
Levchenko Igor,
Ostrikov Kostya,
Keidar Michael
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200700043
Subject(s) - nanodot , quantum dot , cluster (spacecraft) , deposition (geology) , nanotechnology , materials science , chemical physics , atom (system on chip) , cluster size , molecular dynamics , molecular physics , physics , quantum mechanics , paleontology , sediment , computer science , embedded system , biology , programming language
The controlled growth of ultra‐small Ge/Si quantum dot (QD) nuclei (≈1 nm) suitable for the synthesis of uniform nanopatterns with high surface coverage, is simulated using atom‐only and size non‐uniform cluster fluxes. It is found that seed nuclei of more uniform sizes are formed when clusters of non‐uniform size are deposited. This counter‐intuitive result is explained via adatom‐nanocluster interactions on Si(100) surfaces. Our results are supported by experimental data on the geometric characteristics of QD patterns synthesized by nanocluster deposition. This is followed by a description of the role of plasmas as non‐uniform cluster sources and the impact on surface dynamics. The technique challenges conventional growth modes and is promising for deterministic synthesis of nanodot arrays.