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Metal Based Thin Films for Electronics
Author(s) -
Pearton Steve
Publication year - 2006
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200600084
Subject(s) - citation , library science , nanotechnology , engineering , materials science , art history , computer science , art