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Two‐Dimensional Simulation of Nanoassembly Precursor Species in Ar+H 2 +C 2 H 2 Reactive Plasmas
Author(s) -
Ostrikov Kostya Ken,
Yoon HyunJin,
Rider Amanda E.,
Vladimirov Sergey V.
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200600070
Subject(s) - plasma , nanolithography , materials science , carbon fibers , plasma chemistry , nanotechnology , analytical chemistry (journal) , chemistry , physics , composite material , chromatography , fabrication , composite number , medicine , alternative medicine , pathology , quantum mechanics
Abstract The results of two‐dimensional fluid simulation of number densities and fluxes of the main building blocks and surface preparation species involved in nanoassembly of carbon‐based nanopatterns in Ar+H 2 +C 2 H 2 reactive plasmas are reported. It is shown that the process parameters and non‐uniformity of surface fluxes of each particular species may affect the targeted nanopattern quality. The results can be used to improve predictability of plasma‐aided nanofabrication processes and optimize the parameters of plasma nanotools.