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Probe Diagnostics of Expanding Plasmas at Low Gas Pressure
Author(s) -
Dimitrova Mariya,
Djermanova Nina,
Kiss'ovski Zhivko,
Kolev Stanimir,
Shivarova Antonia,
Tsankov Tsanko
Publication year - 2006
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200500096
Subject(s) - plasma , argon , plasma cleaning , atomic physics , volume (thermodynamics) , expansion chamber , induction coil , electron density , materials science , electromagnetic coil , gas filled tube , plasma diagnostics , electron temperature , electron , plasma parameters , drop (telecommunication) , chemistry , mechanics , electrical engineering , thermodynamics , physics , quantum mechanics , engineering
Abstract Summary: Results from tandem‐type probe diagnostics of a plasma source based on an inductive discharge are presented in this study. The driver region is in the classical form of a cylindrically shaped inductive discharge, with a coil positioned over a gas discharge tube, whereas a bigger metal chamber provides volume for plasma expansion. Low pressure argon discharges were studied. The axial profiles of the plasma parameters were measured in the discharge in the metal chamber. The results obtained show that decreasing electron temperature and plasma density with increasing distance from the driver characterizes the behavior of the expanding plasmas. Moreover, two regions with different rates of variation of the plasma parameters complete the plasma expansion volume: a faster drop close to the driver and slow axial changes away from it. The gas pressure and power applied for the discharge maintenance were the external parameters varied.Axial profiles of the electron concentration in the plasma expansion region of an inductive discharge.