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Deposition of Hydrocarbon Films by Means of Helium‐Ethylene Fed Glow Dielectric Barrier Discharges
Author(s) -
Fanelli Fiorenza,
Fracassi Francesco,
d'Agostino Riccardo
Publication year - 2005
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200500057
Subject(s) - dielectric barrier discharge , helium , glow discharge , analytical chemistry (journal) , polyethylene , materials science , ethylene , dielectric , deposition (geology) , chemistry , plasma , optoelectronics , composite material , chromatography , organic chemistry , paleontology , physics , quantum mechanics , sediment , biology , catalysis
Abstract Summary: The present work provides a detailed study of helium‐ethylene dielectric barrier glow discharges. The effect of ethylene concentration, total gas flow rate, excitation frequency and applied voltage have been investigated in order to clarify both discharge operational mode, and coating composition. The discharge has been characterized by means of electrical measurements and optical emission spectroscopy, while the stable species contained in the gas effluent have been sampled and analyzed using gas chromatography with mass spectrometry detection to achieve indications on the reactive fragments generated inside the discharge. It has been observed that polyethylene‐like coatings can be obtained for a wide range of electrical conditions, and the deposition rates have been found to range between 20 and 80 nm · min −1 .FT‐IR spectrum of a film deposited by Glow Dielectric Barrier Discharge, GDBD, using a helium‐ethylene containing feed ([C 2 H 4 ] = 0.4%).