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Influence of Non‐Polymerizable Gases Added During Plasma Polymerization
Author(s) -
Hegemann Dirk,
Hossain MohammadMokbul
Publication year - 2005
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200500041
Subject(s) - monomer , polymerization , plasma polymerization , plasma , inert gas , deposition (geology) , inert , volumetric flow rate , materials science , polymer chemistry , chemistry , analytical chemistry (journal) , polymer , organic chemistry , thermodynamics , physics , quantum mechanics , sediment , biology , paleontology
Summary: In plasma polymerization often additional, non‐polymerizable gases are used, either as carrier gas or as reactive co‐monomer. The gas ratio represents an additional parameter, which complicates the understanding of plasma polymerization processes. Therefore, we thoroughly investigated the deposition rates of different gas mixtures (O 2 /HMDSO, N 2 and NH 3 /C x H y , as well as inert gas/C x H y ) on the basis of a macroscopic approach. Since the mass deposition rates depend on the specific energy W / F , the plasma polymerization regime for the corresponding polymerizable monomer can be identified by introduction of a modified flow F = F m + a F c (sum of monomer flow F m and carrier gas flow F c with a flow factor a ). Any deviations discovered during application of this novel approach indicate additional effects, such as ion‐induced effects.