Premium
Free C 2 F 4 Jet Deposition of Thin PTFE‐like Films
Author(s) -
Rebrov Aleksei K.,
Sharafudinov Rustam S.,
Shishkin Andrey V.,
Timoshenko Nikolai I.
Publication year - 2005
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200400081
Subject(s) - jet (fluid) , supersonic speed , deposition (geology) , materials science , monomer , thin film , polymerization , substrate (aquarium) , chemical engineering , polymer chemistry , composite material , analytical chemistry (journal) , nanotechnology , chemistry , polymer , organic chemistry , thermodynamics , physics , paleontology , sediment , geology , engineering , biology , oceanography
Summary: This work studied the possibility of thin PTFE‐like film deposition, from a supersonic jet of PTFE decomposition products down to the monomer state. One of the most important features of gas‐jet deposition is the use of a monomer gas as a precursor with its polymerization on a surface. Under certain conditions, partial polymerization is possible in an adiabatically expanding supersonic jet. Another important feature of this method is the unique possibility of controlling the deposition process by changing parameters of the gas flow and the state of the substrate.Structure of a PTFE‐like film obtained from a He‐C 2 F 4 jet.