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Materials PROCESSING, Theory and Practices, Herausgeber der Serie: F. F. Y. Wang. Vol. 1: Fine Line Lithography, Herausgeber des Bandes: R. Newman, 476 Seiten, 1980, US $ 92.75
Publication year - 1982
Publication title -
physik in unserer zeit
Language(s) - English
Resource type - Journals
eISSN - 1521-3943
pISSN - 0031-9252
DOI - 10.1002/piuz.19820130208
Subject(s) - line (geometry) , materials science , physics , mathematics , geometry