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A non‐contact low‐cost sensor for improved repeatability in co‐evaporated CIGS
Author(s) -
Repins I. L.,
Fisher D.,
Batchelor W. K.,
Woods L.,
Beck M. E.
Publication year - 2005
Publication title -
progress in photovoltaics: research and applications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.286
H-Index - 131
eISSN - 1099-159X
pISSN - 1062-7995
DOI - 10.1002/pip.591
Subject(s) - copper indium gallium selenide solar cells , repeatability , materials science , stage (stratigraphy) , optoelectronics , deposition (geology) , thin film , analytical chemistry (journal) , nanotechnology , chemistry , chromatography , paleontology , sediment , biology
A low‐cost, non‐contact sensor that provides endpoint detectionfor each stage in a three‐stage CuIn x Ga 1− x Se 2 (CIGS( deposition is described. CIGS and precursoremissivity data providing the fundamental basis for the sensor's operation are presented. In situ operation of the sensor is outlined and sensor‐predicted film thickness, maximum Cu ratio during growth, as well as final Cu ratio are compared with those derived by other methods. Characteristics of the sensor relevant to automated and continuous processing are discussed. Copyright © 2005 John Wiley & Sons, Ltd.