Premium
Investigations of temperature and power effects on Cu(In,Ga)Se 2 thin‐film formation during a 3‐stage hybrid co‐sputtering/evaporation process
Author(s) -
Posada Jorge,
Jubault Marie,
Bousquet Angélique,
Tomasella Eric,
Lincot Daniel
Publication year - 2018
Publication title -
progress in photovoltaics: research and applications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.286
H-Index - 131
eISSN - 1099-159X
pISSN - 1062-7995
DOI - 10.1002/pip.2926
Subject(s) - sputtering , evaporation , copper indium gallium selenide solar cells , materials science , indium , raman spectroscopy , analytical chemistry (journal) , gallium , thin film , solar cell , spectroscopy , scanning electron microscope , metallurgy , chemistry , optoelectronics , optics , nanotechnology , composite material , physics , chromatography , quantum mechanics , thermodynamics
This work explores a strategy to bring together the advantages of co‐evaporation and sputtering by developing a hybrid co‐sputtering/evaporation process, where copper, indium, and gallium are sputtered with the thermal evaporation of selenium. A 3‐stage hybrid co‐sputtering/evaporation process for Cu(In,Ga)Se 2 (CIGS) thin films solar cells has been developed by controlling the deposition parameters (temperature, sputtering power, and evaporation). (In,Ga) 2 Se 3 layers are deposited in the first stage, followed by Cu 2 − x Se and Cu 2 − x Se/(In,Ga) 2 Se 3 layers. Material properties at different steps were studied in detail by X‐ray fluorescence, energy dispersive X‐ray, scanning electron microscopy, glow discharge optical emission spectroscopy, Raman spectroscopy, and X‐ray diffraction. Solar cells were completed leading to 9.7% efficiency.