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Probing the growth of β‐FeSi 2 nanoparticles for photovoltaic applications: a combined imaging and spectroscopy study using transmission electron microscopy
Author(s) -
Wong A.S.W.,
Ho G.W.,
Liew S.L.,
Chua K.C.,
Chi D.Z.
Publication year - 2011
Publication title -
progress in photovoltaics: research and applications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.286
H-Index - 131
eISSN - 1099-159X
pISSN - 1062-7995
DOI - 10.1002/pip.1060
Subject(s) - materials science , transmission electron microscopy , sputtering , nanoparticle , annealing (glass) , sputter deposition , microstructure , scanning electron microscope , analytical chemistry (journal) , spectroscopy , chemical engineering , nanotechnology , thin film , metallurgy , chemistry , composite material , chromatography , engineering , physics , quantum mechanics
The microstructure of β‐FeSi 2 nanoparticles grown using magnetron sputtering on Si has been examined using various electron microscopy techniques. FeSi 2 nanoparticles as small as ∼4 nm are found embedded in Si after growth using co‐sputtering of FeSi 2 and Si, followed by rapid thermal annealing (RTA). The formation of nanoparticles and its variation in density with Fe content is discussed in terms of phase separation. Our study shows that the size and density of the nanoparticles as well as the extent of Fe diffusion into sputtered Si and substrate can be controlled by controlling the Fe content in the co‐sputtered film. Copyright © 2011 John Wiley & Sons, Ltd.