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Introduction to microlithography (2nd edition). Edited by L. F. Thompson, C. G. Willson and M. J. Bowden. American Chemical Society, Washington, D.C., 1994. pp. xiv + 527, price US$59.95. ISBN 0‐8412‐2848‐5
Author(s) -
Pethrick R. A.
Publication year - 1995
Publication title -
polymer international
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.592
H-Index - 105
eISSN - 1097-0126
pISSN - 0959-8103
DOI - 10.1002/pi.1995.210370312
Subject(s) - citation , library science , art history , history , computer science