Open AccessOptical metasurfaces made by cell projection lithography
Publication year - 2022
Publication title -
photonicsviews
Language(s) - English
Resource type - Journals
eISSN - 2626-1308
pISSN - 2626-1294
DOI - 10.1002/phvs.202270412
Subject(s) - projection (relational algebra) , lithography , electron beam lithography , computer science , citation , quality (philosophy) , computer graphics (images) , optics , world wide web , physics , nanotechnology , materials science , resist , algorithm , layer (electronics) , quantum mechanics