Open AccessMicrosphere – the future of optical microscopes
Author(s) -
Chen Lianwei,
Zhou Yan,
Zhou Rui,
Hong Ming Hui
Publication year - 2021
Publication title -
photonicsviews
Language(s) - English
Resource type - Journals
eISSN - 2626-1308
pISSN - 2626-1294
DOI - 10.1002/phvs.202100039
Subject(s) - microscope , optics , limit (mathematics) , diffraction , lithography , resolution (logic) , materials science , optical microscope , microsphere , laser , feature (linguistics) , photolithography , nanotechnology , optoelectronics , physics , computer science , engineering , scanning electron microscope , artificial intelligence , mathematics , mathematical analysis , linguistics , philosophy , chemical engineering
The diffraction limit has always been a fundamental barrier in optical science and engineering. It limits the minimum feature size in surface patterning technologies such as lithography and laser direct writing. It also restricts the resolution for optical imaging.