Open AccessCost‐Effective Production of Integrated Monolithic Sensor Packages
Author(s) -
Zuehlke HansUlrich,
Gebhardt Mandy
Publication year - 2021
Publication title -
photonicsviews
Language(s) - English
Resource type - Journals
eISSN - 2626-1308
pISSN - 2626-1294
DOI - 10.1002/phvs.202100032
Subject(s) - annealing (glass) , materials science , simulated annealing , magnetoresistance , thermal , magnetic noise , computer science , electrical engineering , electronic engineering , nanotechnology , magnetic field , engineering , composite material , physics , algorithm , quantum mechanics , meteorology , electromagnetic shielding
The growth of the magnetic sensor market is driven by position, speed and angle sensing needs across consumer and industrial applications. Thermal annealing has been used to maximize the magnetoresistance effects of magnetic sensors, but requires multiple steps to produce sensors with different magnetic orientations. This article gives an overview of a new selective laser annealing approach that provides several advantages over thermal annealing, such as enabling smaller magnetic device structures, reducing process steps and simplifying magnetic sensor manufacturing.