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Spin coating behavior of polyimide precursor solutions
Author(s) -
Levinson William A.,
Arnold Anthony,
Dehodgins Ofelia
Publication year - 1993
Publication title -
polymer engineering and science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.760331507
Subject(s) - polyimide , materials science , coating , spin coating , spin (aerodynamics) , composite material , simple (philosophy) , condensed matter physics , thermodynamics , layer (electronics) , physics , philosophy , epistemology
Experimental data confirm the utility of the following simple equation in predicting the spin coating behavior of polyimide precursor solutions:\documentclass{article}\pagestyle{empty}\begin{document}$$ {\rm h} = {\rm c\beta }_{\rm 0} {\rm k}^{{\rm \beta }_{\rm 1} } {\rm \omega }^{{\rm \beta }_{\rm 2} } {\rm t}^{{\rm \beta }_{\rm 3} } \quad\quad\quad\quad{\rm (1)} $$\end{document} in which\documentclass{article}\pagestyle{empty}\begin{document}$$ \begin{array}{*{20}c} {c = {\rm polymer\, solution\, solid\, weight\, fraction;}} \\ {\beta _i = {\rm fitted\, coefficient\, (Greek\, letter\, beta)};} \\ \quad{h = {\rm film\, thickness\, after\, cure\, or\, solvent\, removal};} \\ \quad{k = {\rm polymer\, solution\, kinematic\, viscosity, centistokes};} \\ {t = {\rm time},{\rm and;}} \\ \quad{\omega = {\rm wafer\, spin\, speed, rpm (Greek\, letter\, omega)}.} \\ \end{array} $$\end{document} .