Premium
Water‐Soluble contrast enhancing materials—new photobleachable dyes
Author(s) -
Yonezawa T.,
Kikuchi H.,
Hayashi K.,
Tochizawa N.,
Endo N.,
Fukuzawa S.,
Sugito S.,
Ichimura K.
Publication year - 1989
Publication title -
polymer engineering and science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.760291403
Subject(s) - photobleaching , resist , materials science , polymer , water soluble , contrast (vision) , lithography , nanotechnology , high contrast , chemical engineering , fluorescence , organic chemistry , chemistry , optics , optoelectronics , composite material , physics , engineering , layer (electronics)
Many styrylpyridinium compounds (SPC), which are very stable in the dark, were prepared and evaluated as photobleachable dyes for contrast enhanced lithography (CEL). The photobleaching characteristics of water‐soluble contrast enhancing materials composed of SPC and water‐soluble polymer depend on the structure of the SPC and the kind of polymers used. The technique using SPC‐based CEL proved to be very effective for the resist pattern profiles.