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Studies of dissolution phenomena in microlithography
Author(s) -
Krasicky P. D.,
Groele R. J.,
Jubinsky J. A.,
Rodriguez F.,
Namaste Y. M. N.,
Obendorf S. K.
Publication year - 1987
Publication title -
polymer engineering and science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.760270408
Subject(s) - dissolution , polymer , materials science , layer (electronics) , methyl methacrylate , substrate (aquarium) , polymer chemistry , chemical engineering , composite material , monomer , oceanography , engineering , geology
During the dissolution process, polymer in the glassy state is, transported into a dilute solution. In some cases, a transition layer can be measured using laser interferometry. This layer is seen as a difference in reflected light intensity between the bare substrate and the maximum during dissolution. When poly(methyl methacrylate) dissolves in methyl ethyl ketone, the layer is not detectable below a polymer number‐average molecular weight of about 30,000. The layer becomes more pronounced as molecular weight of polymer increases.