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Limits of optical lithography
Author(s) -
Wilczynski Janusz S.
Publication year - 1986
Publication title -
polymer engineering and science
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.760261613
Subject(s) - watson , ibm , citation , corporation , computer science , center (category theory) , computer graphics (images) , library science , optics , physics , artificial intelligence , political science , crystallography , law , chemistry