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Plasma polymerization of hexamethyldisiloxane in the gas phase. II. Formulation of various selected parameters affecting rate of polymerization and their optimization
Author(s) -
Akovali G.
Publication year - 1981
Publication title -
polymer engineering and science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.760211106
Subject(s) - hexamethyldisiloxane , volumetric flow rate , materials science , polymerization , plasma polymerization , deposition (geology) , yield (engineering) , phase (matter) , composite number , plasma , analytical chemistry (journal) , chemical engineering , composite material , polymer , thermodynamics , chromatography , chemistry , organic chemistry , physics , paleontology , quantum mechanics , sediment , biology , engineering
Formulation of three selected operational parameters (flow rate of monomer, radio frequency power applied, and reactor tube pressure) affecting rate of polymerization of HMDS by plasma at 13.56 MHz is made by use of rotatable central composite (RCC) statistical design. The flow rate is found to be the most important parameter in determining deposition rate, followed by power and pressure; optimum values of these three to yield maximum deposition rate are also evaluated.