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Modeling nanoporosity development in polymer films for low‐k applications
Author(s) -
Doshi Prathamesh,
Simon Sindee
Publication year - 2005
Publication title -
polymer engineering and science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.20317
Subject(s) - materials science , supersaturation , nucleation , bubble , thermal diffusivity , polymer , mass transfer , diffusion , shell (structure) , fick's laws of diffusion , gaseous diffusion , thermodynamics , chemical engineering , composite material , mechanics , physics , engineering , fuel cells
The bubble growth dynamics of a polymer supersaturated with CO 2 have been modeled for micron‐size films after nucleation. The model equations are based on the shell model of Arefmanesh, Advani, and Michaelides in which a nucleated bubble is surrounded by a finite concentric shell of polymer supersaturated with gas. Bubbles grow by mass transfer of dissolved gas from this shell. The model is extended to allow for diffusion of dissolved gas out of the shell in addition to diffusion into the bubble. A parametric analysis is performed to examine the effects of film thickness, temperature, diffusivity at the T g and Henry's law constant. POLYM. ENG. SCI., 45:640–651, 2005. © 2005 Society of Plastics Engineers