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Measurement and modeling of solvent removal for spin coating
Author(s) -
Gu J.,
Bullwinkel M. D.,
Campbell G. A.
Publication year - 1996
Publication title -
polymer engineering and science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.503
H-Index - 111
eISSN - 1548-2634
pISSN - 0032-3888
DOI - 10.1002/pen.10489
Subject(s) - spin coating , materials science , coating , solvent , spinning , chemical mechanical planarization , permeation , spin (aerodynamics) , line (geometry) , film coating , chemical engineering , composite material , polishing , thermodynamics , organic chemistry , chemistry , biochemistry , physics , geometry , mathematics , membrane , engineering
Solvent concentration is an important factor for spin‐coated film planarization. Two techniques, one an on‐line optical method and the other an off‐line gel permeation chromatography method, have been used to investigate the coating concentration change during spinning. The experimental observations are compared with the spin‐coating model predictions. The modeled concentration and thickness are in close agreement with experiment. Under certain conditions, the spin‐coating model can be significantly simplified. These conditions are discussed.