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Micromachining of Parylene C for bioMEMS
Author(s) -
Kim Brian J.,
Meng Ellis
Publication year - 2016
Publication title -
polymers for advanced technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.61
H-Index - 90
eISSN - 1099-1581
pISSN - 1042-7147
DOI - 10.1002/pat.3729
Subject(s) - surface micromachining , parylene , microelectromechanical systems , materials science , nanotechnology , biocompatibility , microsystem , bulk micromachining , microfabrication , fabrication , polymer , composite material , metallurgy , medicine , alternative medicine , pathology
Recent advances in the micromachining of poly(p‐xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro‐p‐xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high‐level overview of state‐of‐the‐art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material. Copyright © 2015 John Wiley & Sons, Ltd.