Premium
Polymers for microelectronics resists and dielectrics, L. F. Thompson, C. G. Wilson and S. Tagawa, eds. ACS Symposium Series 537, Washington, DC (1994)
Author(s) -
Tesoro G. C.
Publication year - 1995
Publication title -
polymers for advanced technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.61
H-Index - 90
eISSN - 1099-1581
pISSN - 1042-7147
DOI - 10.1002/pat.1995.220060318
Subject(s) - microelectronics , library science , engineering physics , materials science , polymer science , art history , computer science , nanotechnology , physics , art
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom