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Considering Nonlinearities to Design Micro System's Vibrational Sensitivity
Author(s) -
Roeser Dennis,
Gutschmidt Stefanie,
Sattel Thomas
Publication year - 2017
Publication title -
pamm
Language(s) - English
Resource type - Journals
ISSN - 1617-7061
DOI - 10.1002/pamm.201710159
Subject(s) - sensitivity (control systems) , actuator , parametric statistics , cantilever , resonance (particle physics) , thermoelastic damping , excitation , physics , mechanical system , parametric oscillator , vibration , motion (physics) , control theory (sociology) , equations of motion , acoustics , computer science , classical mechanics , engineering , electronic engineering , mathematics , electrical engineering , mechanical engineering , thermal , optics , atomic physics , aerospace engineering , thermodynamics , quantum mechanics , control (management) , artificial intelligence , statistics
This contribution analyses the impact of nonlinearities on the sensitivity of micro‐electro‐mechanical sensors measuring quantities based on a change in resonance frequency. The considered sensor is an array of cantilevers which have an integrated actuator and sensor. The mathematical model presented to describe the motion of this array is based on a coupled thermoelastic equation of motion which has a forced and a parametric excitation. Finally, a concept is presented to utilize a two‐to‐one internal resonance to increase a micro system's vibrational sensitivity. (© 2017 Wiley‐VCH Verlag GmbH & Co. KGaA, Weinheim)