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Modelling and Optimization of a Silicon Tuning Fork Gyroscope
Author(s) -
Kugi A.,
Thull D.,
Seidel H.
Publication year - 2004
Publication title -
pamm
Language(s) - English
Resource type - Journals
ISSN - 1617-7061
DOI - 10.1002/pamm.200410015
Subject(s) - tuning fork , gyroscope , piezoresistive effect , fork (system call) , silicon , fabrication , basis (linear algebra) , computer science , electronic engineering , vibrating structure gyroscope , piezoelectricity , materials science , control theory (sociology) , engineering , mechanical engineering , electrical engineering , physics , optoelectronics , acoustics , aerospace engineering , mathematics , artificial intelligence , control (management) , vibration , medicine , alternative medicine , geometry , pathology
This contribution deals with the systematic derivation of an analytical model for a silicon tuning fork gyroscope with piezoelectric drive and piezoresistive read‐out. The mathematical model serves as a basis for optimizing the overall sensor structure, for testing the electronic circuitry and for investigating the influence of disturbances, e.g. due to fabrication tolerances, on the measurement quality. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)