Modelling and Optimization of a Silicon Tuning Fork Gyroscope | Zendy

Kugi A. | Zendy; Thull D. | Zendy; Seidel H. | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Premium

Modelling and Optimization of a Silicon Tuning Fork Gyroscope

Author(s) -

Kugi A.,

Thull D.,

Seidel H.

Publication year - 2004

Publication title -

pamm

Language(s) - English

Resource type - Journals

ISSN - 1617-7061

DOI - 10.1002/pamm.200410015

Subject(s) - tuning fork , gyroscope , piezoresistive effect , fork (system call) , silicon , fabrication , basis (linear algebra) , computer science , electronic engineering , vibrating structure gyroscope , piezoelectricity , materials science , control theory (sociology) , engineering , mechanical engineering , electrical engineering , physics , optoelectronics , acoustics , aerospace engineering , mathematics , artificial intelligence , control (management) , vibration , medicine , alternative medicine , geometry , pathology

This contribution deals with the systematic derivation of an analytical model for a silicon tuning fork gyroscope with piezoelectric drive and piezoresistive read‐out. The mathematical model serves as a basis for optimizing the overall sensor structure, for testing the electronic circuitry and for investigating the influence of disturbances, e.g. due to fabrication tolerances, on the measurement quality. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

This content is not available in your region!

Continue researching here.

Having issues? You can contact us here

Accelerating Research