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Forschung & Technik: Optik & Photonik 1/2009
Author(s) -
Scharf Rainer
Publication year - 2009
Publication title -
optik & photonik
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2191-1975
pISSN - 1863-1460
DOI - 10.1002/opph.201190001
Subject(s) - physics
Neues Feld der Nanophotonik 3‐D‐Oberflächeninspektion an bewegten Objekten — SPARC Lichtmikroskop macht atomare Fehlstellen sichtbar Ultrastark und ultraschnell

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