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Cold‐Cathode ion source for sputtered neutral mass spectrometry of metals
Author(s) -
Swingler D. L.
Publication year - 1991
Publication title -
organic mass spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.475
H-Index - 121
eISSN - 1096-9888
pISSN - 0030-493X
DOI - 10.1002/oms.1210260414
Subject(s) - mass spectrometry , cathode , static secondary ion mass spectrometry , ion , materials science , analytical chemistry (journal) , secondary ion mass spectrometry , chemistry , environmental chemistry , chromatography , organic chemistry
A method involving cathodic sputtering and post‐ionization in the electronflux of a Penning discharge is described for the analysis of metals.