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On a finite element method for a compressible viscous flow in a MOCVD reactor
Author(s) -
Duque Jairo
Publication year - 2005
Publication title -
numerical methods for partial differential equations
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.901
H-Index - 61
eISSN - 1098-2426
pISSN - 0749-159X
DOI - 10.1002/num.20061
Subject(s) - compressibility , finite element method , metalorganic vapour phase epitaxy , mathematics , boundary value problem , lagrange multiplier , partial differential equation , flow (mathematics) , compressible flow , mathematical analysis , mechanics , thermodynamics , chemistry , physics , geometry , mathematical optimization , epitaxy , organic chemistry , layer (electronics)
We propose a stable finite element method for approximating the flow of a chemically reacting gas mixture in an MOCVD (metal‐organic chemical vapor deposition) reactor. The flow is governed by the full compressible Navier‐Stokes equations extended by transport equations for the chemical species, the energy equations and the equation of state, together with boundary conditions providing information on the reactor geometry and experimental conditions. The equations form a semilinear system with a constraint for which the corresponding pressure term is not the Lagrangian multiplier. An application of our method to a real world model of growth of GaAs shows the consistency with experimental data. © 2004 Wiley Periodicals, Inc. Numer Methods Partial Differential Eq, 2005