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On the evaluation of damping in MEMS in the slip–flow regime
Author(s) -
Frangi A.,
Spinola G.,
Vigna B.
Publication year - 2006
Publication title -
international journal for numerical methods in engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.421
H-Index - 168
eISSN - 1097-0207
pISSN - 0029-5981
DOI - 10.1002/nme.1749
Subject(s) - boundary element method , multipole expansion , microelectromechanical systems , slip (aerodynamics) , accelerometer , traction (geology) , boundary value problem , finite element method , mechanics , engineering , structural engineering , mechanical engineering , computer science , physics , mathematics , mathematical analysis , aerospace engineering , quantum mechanics , operating system
The analysis of fluid damping in micro‐electro‐mechanical systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results. Copyright © 2006 John Wiley & Sons, Ltd.