Open AccessTwo‐dimensional oxide based pressure sensors with high sensitivity
Author(s) -
Liu Hao,
Feng Bo,
Bai Xiaosong,
Qi Tianhang,
Wei Zhiyong,
Liu Ruichao,
Yin Keke,
Gao Jinxing,
Yang Daoyuan,
Zheng Guangchao,
ten Elshof Johan E.,
Shan Chongxin,
Sun QiJun,
Yuan Huiyu
Publication year - 2022
Publication title -
nano select
Language(s) - English
Resource type - Journals
ISSN - 2688-4011
DOI - 10.1002/nano.202100053
Subject(s) - nanosheet , pressure sensor , materials science , sensitivity (control systems) , wearable computer , nanomaterials , nanotechnology , oxide , optoelectronics , wearable technology , repeatability , computer science , electronic engineering , embedded system , engineering , mechanical engineering , chemistry , chromatography , metallurgy
Nanomaterials based pressure sensors have obtained world‐wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e‐skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e‐skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two‐dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 10 6 kPa –1 , which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure‐sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors.