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Sheet resistivity measurements at microwave frequencies
Author(s) -
McGinn V. P.
Publication year - 1995
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.4650080508
Subject(s) - microwave , electrical resistivity and conductivity , materials science , absorption (acoustics) , sheet resistance , optoelectronics , acoustics , electrical engineering , electronic engineering , composite material , engineering , physics , telecommunications , layer (electronics)
Experimental techniques and data manipulation methods that allow highly accurate measurements of sheet resistivity values associated with thin films are presented. The procedure of microwave energy absorption is offered as a time‐efficient, noncontact, and nondestructive investigative means. © 1995 John Wiley & Sons. Inc.