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Microwave characterization of slot line and coplanar strip line on high‐resistivity silicon for a slot antenna feed network
Author(s) -
Simons Rainee N.,
Taub Susan R.,
Lee Richard Q.,
Young Paul G.
Publication year - 1994
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.4650071104
Subject(s) - coplanar waveguide , microstrip , materials science , stripline , feed line , microwave , wafer , optoelectronics , slot antenna , resonator , transmission line , monolithic microwave integrated circuit , insertion loss , line (geometry) , ground plane , silicon , electrical engineering , attenuation , patch antenna , optics , antenna (radio) , microstrip antenna , telecommunications , physics , engineering , amplifier , geometry , cmos , mathematics
This article presents the effective dielectric constant (ϵ eff ) and attenuation constant (α) of an unshielded slot line and a coplanar strip line on a high‐resistivity (5000–10,000 ω‐cm) silicon wafer. The ϵ eff (dc to 40 GHz) and α (dc to 26.5 GHz) in each case are determined from the measured resonant frequencies and insertion loss of a ring resonator. The measurements are carried out at room temperature. No dc bias is applied to the transmission lines. The attenuation for slot line and coplanar stripline on silicon are compared with microstrip line and coplanar waveguide on other semiconductor substrate materials. Lastly, a microstrip‐to‐slot‐line transition and its use in a feed network for linearly tapered slot antennas is demonstrated. © 1994 John Wiley & Sons, Inc.