Optical low‐coherence reflectometry (OLCR) for dimensional monitoring of sheet‐grown silicon | Zendy

Lawson C. M. | Zendy; Michael R. R. | Zendy

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Optical low‐coherence reflectometry (OLCR) for dimensional monitoring of sheet‐grown silicon

Author(s) -

Lawson C. M.,

Michael R. R.

Publication year - 1994

Publication title -

microwave and optical technology letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.304

H-Index - 76

eISSN - 1098-2760

pISSN - 0895-2477

DOI - 10.1002/mop.4650070703

Subject(s) - reflectometry , flatness (cosmology) , silicon , coherence (philosophical gambling strategy) , materials science , optics , optoelectronics , silicon on insulator , physics , computer science , time domain , cosmology , quantum mechanics , computer vision

We report cross‐sectional thickness and flatness measurements for edge‐defined film‐fed growth (EFG) solar silicon using optical low coherence reflectometry (OLCR). The measurement accuracy is ±1.5 μm with the sensor head positioned 1 cm away from the EFG silicon under test. © 1994 John Wiley & Sons, Inc.

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