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Design and fabrication of MEMS lowpass filter exploiting space mapping algorithm
Author(s) -
Xiao Shaohui,
Ou Yi
Publication year - 2021
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.32804
Subject(s) - passband , insertion loss , low pass filter , prototype filter , filter (signal processing) , return loss , electronic engineering , elliptic filter , attenuation , bandwidth (computing) , butterworth filter , filter design , m derived filter , band pass filter , materials science , computer science , physics , engineering , optics , optoelectronics , telecommunications , antenna (radio) , computer vision
A high‐performance microstrip lowpass filter with coplanar waveguide as the ports is proposed and analyzed. By cascading asymmetric hairpin resonators, a compact elliptic function low‐pass filter with wide stop band was realized. The filter was optimized using aggressive space mapping algorithm, and finally a filter with a cut‐off frequency of 11.8 GHz was obtained. Stop bandwidth with attenuation level better than −27 dB extends from 15.6 to 36 GHz. Also, the maximum insertion loss in the passband is 0.9 dB and the return loss is better than −22 dB. The filter is manufactured on the silicon wafer using micro‐electromechanical systems process, and the measured results in good agreement with the simulation results.

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