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Uncooled antenna‐coupled terahertz thermal detector using CMOS process
Author(s) -
Wang Xu
Publication year - 2021
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.32565
Subject(s) - noise equivalent power , responsivity , terahertz radiation , detector , resistor , antenna (radio) , optoelectronics , cmos , materials science , bolometer , noise (video) , electrical engineering , optics , physics , photodetector , engineering , computer science , voltage , artificial intelligence , image (mathematics)
This article presents an uncooled monolithic resonant terahertz (THz) thermal detector using a standard 55 nm CMOS process without any postprocessing procedures. The detector is composed of a resonant loop antenna loaded with a polysilicon resistor and a proportional to absolute temperature (PTAT) sensor which is used as a temperature sensitive device. The basic operation principle, overall design considerations and relatively better measurement results are demonstrated. A maximum responsivity of 30.6 V/W and a minimum noise equivalent power (NEP) of 1.68 μW Hz for the thermal detector are measured at the operating frequency of 910 GHz.