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Linear variable filter enabling an enhanced wavelength gradient based on shadow‐mask sputtering
Author(s) -
Ji Peng,
Gao Song,
Park ChulSoon,
Lee SangShin,
Choi DukYong
Publication year - 2017
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.30883
Subject(s) - fabry–pérot interferometer , materials science , wavelength , optics , shadow mask , bandwidth (computing) , dielectric , fabrication , optical filter , filter (signal processing) , optoelectronics , telecommunications , physics , electrical engineering , computer science , medicine , alternative medicine , pathology , engineering
A linear variable filter (LVF) that improves the wavelength gradient is proposed, and a sample is manufactured using a radio frequency sputtering technique with the help of a vertical shadow mask, which simplifies the fabrication process. The LVF is based on a metal‐dielectric‐metal Fabry–Perot etalon, wherein the dielectric cavity is tapered in thickness along the device so that the resonance wavelength can be continuously tuned at various positions. The produced device shows a filtering range from 443 nm to 602 nm over a distance of 16 mm, which corresponds to a wavelength gradient of 10 nm/mm. The measured spectra exhibited, on average, a peak transmission of 39% and a spectral bandwidth of 46 nm.