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Micromachined substrate slots for RF on‐chip isolation
Author(s) -
Wang Tao,
Lu SheyShi
Publication year - 2015
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.28918
Subject(s) - substrate (aquarium) , cmos , microwave , materials science , optoelectronics , substrate coupling , chip , radio frequency , isolation (microbiology) , electrical engineering , electronic engineering , engineering , telecommunications , nanotechnology , oceanography , microbiology and biotechnology , layer (electronics) , trench , biology , geology
A CMOS‐compatible substrate slotting technique is demonstrated in CMOS 0.18 µm technology to improve RF isolation. Isolations in 50 and 100 µm distances are improved by 32 and 28 dB, respectively. Experiments show substrate signal attenuates isotropically on the substrate surface and a substrate network that can model the substrate slot. © 2015 Wiley Periodicals, Inc. Microwave Opt Technol Lett 57:643–645, 2015