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Design and fabrication of novel microlens–micromirrors array for infrared focal plane array
Author(s) -
JianHua Yan,
Wen Ou,
Yi Ou,
LiJun Zhao
Publication year - 2012
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.26722
Subject(s) - microlens , materials science , optics , fabrication , optoelectronics , infrared , layer (electronics) , silicon , nanotechnology , lens (geology) , physics , medicine , alternative medicine , pathology
Abstract A simple method on fabricating a novel structure of microlens–micromirrors array (MMA) with 100% fill factor and smooth surface profile is presented. The MMA has a special structure, which has a microlens array with foot diameter of 35 μm on the upper layer and a micromirrors array with top width of 50 μm and bottom width of 30 μm on the lower layer. These two arrays are connected by a thin layer of silicon. The new structure has potential to integrate with infrared focal plane arrays (IRFPAs). An analytical optical model is established and experimentally verified; results show that all of the incident infrared lights within a certain range can be absorbed by the photosensitive surface of IRFPAs with this structure. © 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:879–884, 2012; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26722