Premium
Characterization of SrTiO 3 thin films at microwave frequencies using coplanar waveguide linear resonator method
Author(s) -
Marulanda J. I.,
Cremona M.,
Santos R.,
Carvalho M. C. R.,
Demenicis L. S.
Publication year - 2011
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.26233
Subject(s) - microwave , coplanar waveguide , materials science , dissipation factor , resonator , dielectric , thin film , characterization (materials science) , dielectric resonator , waveguide , sputter deposition , optoelectronics , cavity magnetron , optics , sputtering , engineering , physics , telecommunications , nanotechnology
Experimental characterization of the dielectric properties of a SrTiO 3 ( STO ) thin film in the microwave frequency range at room temperature is presented. The coplanar waveguide linear resonator technique, which is already well‐established for thick film characterization, was tailored and improved to allow thin film measurements. Experimental results are in very good agreement with theoretical analysis. Using this approach, a relative dielectric constant of 95 and a loss tangent less than 10 −3 were measured for a STO film with 4.2 μm of thickness deposited by radio frequency (RF) magnetron sputtering. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett 53:2418–2422, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26233