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Fabrication of system with probe for high‐frequency measurement applications
Author(s) -
Matsumoto Keiji,
Choi Woon,
Tomokage Hajime
Publication year - 2010
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.25416
Subject(s) - fabrication , microwave , ceramic , materials science , optoelectronics , electrode , electrical engineering , system of measurement , electronic engineering , engineering , telecommunications , composite material , chemistry , physics , medicine , alternative medicine , pathology , astronomy
In this study, a new type of low temperature co‐fired ceramic (LTCC) probes fabricated using the system‐in‐package (SiP) technology is proposed; these probes are used for high‐frequency measurements. The advantage of LTCC probes is that suitable structures of the metal tips of their electrodes can be easily created by cutting LTCC sheets during the fabrication process. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 2083–2087, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25416