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RF MEMS tunable filter using micro fixed–fixed beam
Author(s) -
Islam Md. Fokhrul,
Mohd Ali Mohd Alauddin,
Majlis Burhanuddin Yeop
Publication year - 2010
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.24981
Subject(s) - microelectromechanical systems , band pass filter , microwave , capacitive sensing , insertion loss , filter (signal processing) , materials science , return loss , electronic engineering , electrical engineering , optoelectronics , engineering , telecommunications , antenna (radio)
In this article, a tunable bandpass filter using micro fixed‐fixed beam structure is designed, simulated, and fabricated. The filter is designed by micromachined capacitive bridges, with an original passive topology. The fabricated filter occupies a chip area of 12 × 3 mm 2 and achieved an insertion loss of less than 2 dB and return loss of less than −15 dB throughout the operation band, thereby tuning the filter centre frequency by 11% between 8.76 and 9.8 GHz. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 592–597, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24981
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