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Air‐bridge‐integrated stub filter for submillimeter wave applications
Author(s) -
Gu Dazhen,
RodriguezMorales Fernando,
Yngvesson Sigfrid K.
Publication year - 2009
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.24375
Subject(s) - fabrication , microwave , optoelectronics , planar , terahertz radiation , materials science , engineering , filter (signal processing) , attenuator (electronics) , photolithography , band stop filter , miniaturization , waveguide filter , optics , attenuation , electrical engineering , filter design , physics , low pass filter , prototype filter , telecommunications , computer science , medicine , alternative medicine , computer graphics (images) , pathology
We report a coplanar waveguide notch filter with an integrated air‐bridge, designed for operation at submillimeter wave frequencies and cryogenic temperatures. The filter is built with a planar slot‐ring antenna, which is in turn loaded with a superconducting mixer detector. The filter is designed to have a narrow‐band response with 40 dB of attenuation at 1.56 THz. The fabrication of the micrometer‐scale structure was accomplished by means of UV photolithography and electroplating. The optimized microelectronic fabrication process produced high yields and good reliability. Preliminary measurements of a submillimeter wave receiver based on this design showed satisfactory performance of the filter. © 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 1436–1439, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24375