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Millimeter‐wave transition of coplanar line to substrate‐integrated LiNbO 3 waveguide for traveling‐wave electro‐optical modulator
Author(s) -
Mortazy Ebrahim,
Xu Feng,
Meunier Michel,
Wu Ke
Publication year - 2009
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.24229
Subject(s) - coplanar waveguide , materials science , microwave , optoelectronics , resonator , extremely high frequency , substrate (aquarium) , waveguide , bandwidth (computing) , optics , engineering , telecommunications , physics , oceanography , geology
In this article, a transition of coplanar line to substrate‐integrated waveguide onto electro‐optical LiNbO 3 substrate for the design of traveling‐wave optical phase modulator at 60 GHz were proposed, designed, and fabricated for the first time. Micromachining of the LiNbO 3 substrate, which is transparent to a wide range of laser wavelengths, was done by using Excimer laser. Metallized via holes around the coplanar line are considered for the purpose of mode suppression. Also, a cavity resonator was designed to increase the circuit bandwidth. Measurement results show about 5 GHz bandwidth for the demonstrated substrate‐integrated electro‐optical waveguide. © 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 1105–1107, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24229