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A tunable capacitor using a finger patterned electrode
Author(s) -
Chul Lee Young,
Hyun Ko Kyung
Publication year - 2009
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.24108
Subject(s) - capacitor , materials science , capacitance , dielectric , electrode , metal insulator metal , optoelectronics , microwave , substrate (aquarium) , thin film , insulator (electricity) , electrical engineering , voltage , nanotechnology , telecommunications , engineering , chemistry , oceanography , geology
Using a lead zinc niobate (PZN) thin film dielectric, a tunable metal‐insulator‐metal (MIM) capacitor is presented and investigated in this article. To improve its tunability and bias characteristics, the finger patterned electrode in the top metal is devised. The capacitors were fabricated on a low‐resistivity Si substrate employing lead zinc niobate (PZN) thin film dielectric. The fabricated capacitor, whose line width and spacing was 2.5 and 2.0 μm, respectively, achieved the effective capacitance tunability of 22.9% at 5.5 V. This achieved tunability is higher value of 10% than that of the conventional rectangular MIM capacitor at 900 MHz. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 418–421, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24108