Premium
Implementation of high quality‐factor on‐chip tuned microwave resonators at 7 GHz
Author(s) -
Melik Rohat,
Demir Hilmi Volkan
Publication year - 2009
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/mop.24103
Subject(s) - resonator , microwave , q factor , capacitor , capacitance , chip , resonance (particle physics) , quality (philosophy) , electronic engineering , optoelectronics , materials science , electrical engineering , engineering , physics , telecommunications , voltage , electrode , particle physics , quantum mechanics
We report on the design, analytical modeling, numerical simulation, fabrication, and experimental characterization of chip‐scale microwave resonators that exhibit high quality‐factors (Q‐factors) in the microwave frequency range. We demonstrate high Q‐factors by tuning these microwave resonators with the film capacitance of their LC tank circuits rather than the conventional approach of using external capacitors for tuning. Our chip‐scale resonator design further minimizes energy losses and reduces the effect of skin depth leading to high Q‐factors even for significantly reduced device areas. Using our new design methodology, we observe that despite the higher resonance frequency and smaller chip size, the Q‐factor is improved compared with the previous literature using traditional approaches. For our 540 μm × 540 μm resonator chip, we theoretically compute a Q‐factor of 52.40 at the calculated resonance frequency of 6.70 GHz and experimentally demonstrate a Q‐factor of 47.10 at the measured resonance frequency of 6.97 GHz. We thus achieve optimal design for microwave resonators with the highest Q‐factor in the smallest space for operation at 6.97 GHz. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 497–501, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24103